• 专利附录
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    • 专利摘要:
    PURPOSE: A sealing structure for a highly moisture-sensitive electronic device element is provided to prevent early breakdown of the electronic device caused by moisture and early deterioration of the capacity of the electronic device by including an encapsulation enclosure and a sealing material located between a substrate and the encapsulation enclosure. CONSTITUTION: The encapsulation enclosure(30) encapsulates all of the highly moisture-sensitive electronic devices(12) on the substrate(10). The sealing material(20) is positioned between the substrate and the encapsulation enclosure to form a partial seal(later to be filled) between the substrate and the encapsulation enclosure around each highly moisture-sensitive electronic device or around groups of highly moisture-sensitive electronic devices.
    公开号:KR20030025868A
    申请号:KR1020020057154
    申请日:2002-09-19
    公开日:2003-03-29
    发明作者:보로슨마이클루이스；슈미텐도프존；베시피터지；세르비키제프리피터
    申请人:이스트맨 코닥 캄파니；
    IPC主号:
    专利说明:

    SEALING STRUCTURE FOR HIGHLY MOISTURE SENSITIVE ELECTRONIC DEVICE ELEMENT AND METHOD FOR FABRICATION}
    [21] BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for controlling moisture in a packaged electronic device, and more particularly, a highly sensitive electronic device element having a plurality of highly sensitive electronic devices, which prevents premature failure of a device or premature degradation of device performance, and a method of manufacturing the same. will be.
    [22] In manufacturing, electronic devices are typically manufactured by assembling large substrates containing a plurality of electronic devices. These substrates are typically selected from the group consisting of glass, plastics, metals, ceramics, silicon and other semiconductor materials, or combinations of these materials. The substrate can be rigid or flexible and can be processed as individual units or as a continuous roll. The main reason for manufacturing a plurality of electronic devices on large individual unit substrates or continuous roll substrates is that manufacturing costs can be reduced by reduced handling, increased yield and yield. In the microelectronics industry, manufacturing costs have decreased considerably as silicon wafer processing has increased from 2 inch wafers to 12 inch wafers. Even in the liquid crystal display (LCD) industry, glass substrate processing has been increased from 300 mm x 400 mm substrates to 600 mm x 700 mm or larger substrates to achieve the same reduction in manufacturing costs. In the manufacture of highly sensitive electronic devices such as organic light emitting devices (OLEDs), polymer light emitting devices, charge coupled device (CCD) sensors, and microelectronic field sensors (MEMS), large individual substrates or continuous substrates having a plurality of highly sensitive electronic devices The roll substrate is produced to achieve the same economic effect as above. FIG. 1A shows an unencapsulated, highly sensitive electronic device element 14 containing a plurality of highly sensitive electronic devices 12 on a separate substrate 10, FIG. 1B is shown at cut line 1B-1B in FIG. 1A. A cross-sectional view of the highly sensitive electronic device element 14 taken schematically is shown. However, the manufacturing process of large individual substrates or continuous roll substrates having a plurality of highly sensitive electronic devices faces the problem that they should not be exposed to moisture even for a short period of time during the manufacturing process, which was not a problem for less sensitive electronics. do.
    [23] In order to prevent premature deterioration of device performance within the specific operating and / or shelf life of the device, the humidity level of a typical electronic device should be about 2500 to 5000 ppm or less. Typically, the device is encapsulated or the device is encapsulated with a desiccant to control the environment to a humidity level in the above range. In order to maintain the humidity levels in the aforementioned ranges, drying agents are used, for example molecular sieve materials, silica gel materials, and materials commonly referred to as Drierite materials. Typically, short-term exposure of the device to humidity levels above 2500 ppm during the manufacture and encapsulation of this type of electronic device does not cause measurable degradation of device performance. For this reason, this type of electronic device is encapsulated after the electronic device is separated from the initial substrate.
    [24] In the manufacture of liquid crystal displays, electronic materials and liquid crystal materials are not very sensitive to moisture; Thus, the encapsulation process of the electronic material and liquid crystal material does not need to be protected from ambient moisture during manufacturing. FIG. 2A illustrates a typical multiple LCD element 28 prior to separation into a single LCD device, and FIG. 2B illustrates a cross-sectional view of the multiple LCD element 28 taken along cut line 2B-2B in FIG. 2A. In LCD manufacturing, the LCD back 22 and LCD front 24 contain a plurality of LCD devices. The LCD rear face 22 and the LCD front face 24 are joined to each other by a sealing material 20 and the sealing material 20 surrounds each LCD device except for a gap therein. After manufacturing the multiple LCD elements 28, the LCD device is separated and filled with liquid crystal material. After charging the LCD device, the gap in the sealing material 20 is sealed with the gap sealing material to retain the liquid crystal material and protect the electronic material 26 and the liquid crystal material on the back of the LCD from moisture. Since the LCD device is not very sensitive to moisture, it typically performs the separation process of multiple LCD elements in the ambient air environment without the protection of the LCD device against moisture, which does not cause measurable degradation.
    [25] Certain high-sensitivity electronic devices, such as organic light emitting devices (OLEDs) or panels, polymer light emitting devices, charge-coupled device (CCD) sensors, and micro-electromechanical sensors (MEMS) require humidity levels to be controlled up to about 1000 ppm. In some devices, humidity control up to 100 ppm or less is required. Such low humidity levels cannot be obtained with the use of desiccants of silica gel materials and desiccants of drierlite materials. When drying at relatively high temperatures, molecular sieve materials can be used to obtain humidity levels of up to 1000 ppm in the enclosure. However, the molecular sieve material has a relatively low moisture capacity at a humidity level of 1000 ppm or less, and the minimum humidity level obtainable with the use of the molecular sieve material depends on the temperature in the enclosure. For example, moisture absorbed at room temperature may be discharged into the enclosure or packaging during thermal cycling, for example to high temperatures of 100 ° C. or higher. Desiccants used in such packaged devices include powders of metal oxides, alkaline earth metal oxides, sulfates, metal halides, or perchloric acids, ie, powders of materials having a relatively low minimum equilibrium humidity and high moisture capacity. However, these materials often chemically absorb moisture relatively slowly than the molecular sieves, silica gel, or drierlite materials described above. This relatively slow reaction with water vapor deteriorates the device performance to a measurable extent and subsequently penetrates from the outside through, for example, moisture absorbed inside the device, water vapor present inside the sealed device, and the seal between the device and the lid. Due to the moisture, the inside of the device cover must be sealed with the desiccant. In addition, highly sensitive electronics typically should not be exposed to moisture levels above 1000 ppm during manufacture and encapsulation, and control of moisture levels is required until fully encapsulated. For this reason, moisture levels must be controlled during manufacturing and encapsulation to prevent performance degradation.
    [26] In order to reduce the amount of moisture absorbed inside the device or the amount of moisture present inside the sealed device, a highly sensitive device such as an organic light emitting device (OLED) or panel, a polymer light emitting device, a charge coupled device (CCD) sensor, And micro-electromechanical sensors (MEMS) are often sealed in low-humidity environments such as dryboxes with humidity levels of less than 1000 ppm. In order to keep the sealed device interior at a low humidity level, the highly sensitive device is completely sealed in a low humidity environment prior to performing any further processing steps such as coupling of the interconnects and module assembly. To achieve this low humidity sealing, highly sensitive devices, such as charge coupled device (CCD) sensors and microelectronic field sensors (MEMS), typically are separated from a multi-element substrate or wafer, and then a single element with separate cover elements. As individually sealed. Other devices, such as organic light emitting devices (OLEDs), are sealed as a plurality of devices on a single element; However, current manufacturing methods use individual cover elements of metal or glass to seal each device before separation. FIG. 3A shows a typical multiple OLED device 34 containing a plurality of OLED devices 32 encapsulated with individual encapsulation inclusions 30 and sealing material 20 on individual substrates 10, FIG. 3B 3A shows a cross-sectional view of the multiple OLED device 34 along cut line 3B-3B. In these two current methods for sealing high sensitive devices, a significant level of handling is required to assemble individual cover elements into individual device elements or multiple device elements within a low humidity environment.
    [27] In order to reduce the handling of individual lid elements for encapsulating multiple, highly sensitive device elements in a low humidity environment, the LCD sealing method can be modified to eliminate the gap between the substrate and the capsule enclosure prior to bonding. 4A shows a substrate 10 containing a plurality of highly sensitive electronic devices 12, a single encapsulation enclosure 30 encapsulating all of the highly sensitive electronic devices 12 on the substrate 10, and a sealing material 20 A highly sensitive electronic device element 14 is shown. The problem with this technique is that when both the substrate 10 and the encapsulation enclosure 30 are moved at predetermined intervals after being in contact with the scaling material, as shown in FIG. 4A, due to the high air pressure formed inside each sealing region The sealing material 20 is damaged. Such damage typically appears as a narrow seal width or as a uniform gap in the seal, which reduces or eliminates the protective effect of the highly sensitive electronics. 4B is a cross-sectional view of the highly sensitive electronic device element 14 taken along cut line 4B-4B in FIG. 4A. Therefore, a high-sensitivity electronic device element in which the high-sensitivity electronic device is protected from moisture during the manufacturing process without damaging the seal necessary for protecting the high-sensitivity electronic device during manufacturing and encapsulation, and a method of manufacturing the high-sensitivity electronic device are desirable. something to do.
    [28] Methods and / or control materials for controlling humidity levels inside an encapsulated or encapsulated electronic device have been described in numerous documents. For example, European Patent Application No. 0 776 147 A1 to Kawami et al. Discloses an organic EL device containing a dry substrate made of a solid compound for chemically absorbing moisture and enclosed in a sealed container. . The dry substrate is spaced apart from the organic EL element and reinforced to a predetermined shape by vacuum deposition, sputtering or spin coating. Kawami et al. Teach the use of desiccants such as alkali metal oxides, alkaline earth metal oxides, sulfates, metal halides and perchlorates. However, Kawami et al. Do not teach a method of manufacturing a multiple EL device element having a plurality of sealed containers or a multiple EL device element having a plurality of sealed containers. Also, Kawami et al. Do not discuss or teach the problems of handling and sealing of multiple EL device elements, and solutions thereof, for example, preventing sealing damage due to high air pressure inside the sealing area during encapsulation.
    [29] Shore, U.S. Patent No. 5,304,419, discloses a moisture and particle getter for an enclosure that seals electronics. Part of the inner surface of the enclosure is coated with a pressure sensitive adhesive containing a solid desiccant.
    [30] Shore's U.S. Pat.No. 5,401,536 describes a method for providing an electronic device with a moisture-free enclosure containing a coating or adhesive having desiccant properties. The coating or adhesive comprises protonated alumina silicate powder dispersed in a polymer.
    [31] Shore's U.S. Patent No. 5,591,379 discloses a moisture gettering composition for hermetic electronics. The composition is applied as a coating or an adhesive on the inner surface of the device packaging, the composition comprising a water vapor permeable binder dispersed in a desiccant, which is preferably a molecular sieve material.
    [32] Shore did not teach in any of the above patents the provision of multiple device elements, or moisture-free enclosures for multiple device elements.
    [33] US Patent No. 4,081,397 to Booe describes compositions for stabilizing electrical and electronic properties of electrical and electronic devices. The composition comprises alkaline earth oxides in the elastomeric matrix. However, booleans do not teach methods that can be used to stabilize the electrical and electronic properties of multiple device devices, or multiple electronic devices and multiple electronic devices.
    [34] US Patent No. 4,357,557 to Inohara et al. Describes a thin film electroluminescent display panel sealed with a pair of glass substrates to protect it from the surrounding environment. This method recovers air and gas under vacuum from a cavity defined by a protective liquid injected between glass substrates, a spacer disposed to measure the gap between a pair of substrates, and introduces the protective liquid into the cavity. An injection hole formed in one of the substrates, an adhesive applied to provide a bond between the substrate and the spacer, a hygroscopic component introduced into the protective liquid, and an adhesive for sealing the injection hole. Inohara et al. Did not teach both the method of manufacturing a multiple EL device element having a plurality of hermetically sealed containers or the multiple EL device element having a plurality of hermetically sealed containers. In addition, Inohara et al. Did not discuss or teach the problems of handling and sealing of multiple EL device elements, and solutions thereof, for example, preventing sealing damage due to high air pressure inside the sealing area during encapsulation. The use of injection holes in one of the substrates can prevent damage to the seal caused by excess ambient gas penetrating through the injection holes during encapsulation, but Inohara et al. Have not taught the purpose of providing the injection holes. Instead of the purpose of the injection hole, a protective liquid is introduced into the cavity defined by the substrate.
    [35] U.S. Patent No. 5,239,228 to Taniguchi et al. Describes a method of protecting thin film electroluminescent devices with grooves in a sealing plate as an additional feature to capture excess adhesive, similar to Inohara et al. The groove may also contain a moisture absorbent. Further, Taniguchi et al. Did not teach a method of manufacturing a multiple EL device element having a plurality of sealed containers or a multiple EL device element having a plurality of sealed containers. Further, Taniguchi et al. Did not discuss or teach the problems of handling and sealing of multiple EL device elements, and their solutions, for example, preventing sealing damage due to high air pressure inside the sealing area during encapsulation.
    [36] Harvey et al. US Pat. No. 5,771,562 discloses providing an organic light emitting device on a substrate, externally coating the organic light emitting device with a film of an inorganic dielectric anisotropic material, and sealing an inorganic layer over the dielectric anisotropic material. It discloses an airtight method of the organic light emitting device, including the step of fixing to. Harvey et al. Do not teach a method of manufacturing multiple OLED device elements having a plurality of closed containers, or multiple OLED device elements having a plurality of closed containers. Although the inorganic dielectric anisotropic layer can provide a temporary protective effect from moisture during the encapsulation process, Harvey et al. Have not taught how to use the layer in the manufacture of multiple OLED device devices having a plurality of closed containers.
    [37] US Pat. No. 6,226,890 to Boroson et al. Describes a method for drying the surrounding environment surrounding a highly sensitive electronic device enclosed in an enclosure, which is characterized by the desiccant comprising solid particles having a particle diameter of 0.1 to 200 μm. Include a choice. The desiccant is selected such that the minimum equilibrium humidity level in the sealed enclosure is lower than the humidity level sensitive to the device. The binder is selected to maintain or enhance the moisture absorption rate of the desiccant in the formulation of the chosen desiccant. The binder can be liquid or dissolved in liquid. A castable formulation is formed comprising one or more desiccant particles and a binder, with a preferred weight fraction of desiccant particles in the formulation being 10% to 90%. A measurand of the formulation is cast on a portion of the interior surface of the enclosure to form a dry layer on the surface and to form an enclosure with a sealing flange. The blend solidifies to form a solid dry layer and seal the electronics with an enclosure along the sealing flange. However, Boroson et al. Did not teach how to dry the surrounding environment surrounding multiple high sensitive electronic devices sealed within a plurality of enclosures.
    [38] Summary of the Invention
    [39] SUMMARY OF THE INVENTION An object of the present invention is to provide a highly sensitive electronic device having a highly sensitive electronic device, and a method for manufacturing the device which prevents damage of the sensitive electronic device in the device due to moisture and the present invention makes the device easier to manufacture than the prior art. To provide a way.
    [40] In one aspect, the object is
    [41] a) a substrate containing two or more sensitive electronics;
    [42] b) an encapsulation enclosure that encapsulates all highly sensitive electronics on the substrate;
    [43] c) a sealing material positioned between the substrate and the encapsulation enclosure to form a partial seal between the substrate and the capsule enclosure and a space around each sensitive electronic device or group of sensitive electronic devices; And
    [44] d) can be achieved by a highly sensitive electronic device having a highly sensitive electronic device, the water absorbent material being located between the substrate and the capsule enclosure and present in a space defined by the sealing material.
    [45] In another aspect, the above object is a method of manufacturing a highly sensitive device element having a plurality of highly sensitive electronic devices such as an OLED device on a single substrate, wherein the device is protected from moisture before separating from the substrate into individual devices. and,
    [46] a) coating a substrate containing at least two highly sensitive electronic devices having a temporary moisture barrier; Or coating the water absorbent material on a substrate or one of the encapsulation enclosures located on the encapsulation enclosure such that after bonding, the water absorbent material is located within each of the highly sensitive electronic devices or a group of each of the highly sensitive electronic devices. step; Or coating both the temporary moisture barrier and the water absorbent material;
    [47] b) after sealing, the sealing material is positioned around each of the highly sensitive electronics or around a group of highly sensitive electronics, and the sealing material is wrapped around each of the highly sensitive electronics such that there is a gap that is not covered by the sealing material at one or more locations. Placing on an encapsulation enclosure around a group of highly sensitive electronic devices;
    [48] c) placing the substrate and the encapsulation in a vicinity closely aligned with each other, wherein the substrate and the enclosure are spaced apart at a location that provides an initial ambient pressure of the aligned location, wherein one of the substrate and the enclosure Containing a sealing material;
    [49] d) between the substrate and the encapsulation enclosure until the sealing material is in contact with both the substrate and the encapsulation enclosure, the substrate and the enclosure are spaced to a predetermined range and discharged through an excess ambient gas gap but remain in at least part of the gap. Providing relative movement;
    [50] e) bonding a sealing material to both the substrate and the encapsulation enclosure;
    [51] f) separating the highly sensitive electronics into individual devices or groups of devices having a portion of the initial substrate; And
    [52] and g) sealing the gaps.
    [53] Highly sensitive electronic device elements having highly sensitive electronic devices according to the present invention, and their manufacturing method for preventing premature failure of the device or premature degradation of device performance, provide the following advantages over the prior art methods; All highly sensitive devices on a single substrate as a single device with a single encapsulation encapsulation that encapsulates all the highly sensitive electronic devices on the substrate prior to separating all of the highly sensitive devices on a single substrate into smaller single or multiple device elements. Sealing as a single element, thereby reducing handling of the device and encapsulation enclosure; Improve the protective effect from moisture before exposure to the environment; Improve compatibility with the automated processing required for high volume manufacturing; Improve compatibility with processes in low humidity environments; Reduces encapsulation drawbacks due to pressure differentials inside and outside the highly sensitive electronics.
    [54] It is an object of the present invention to provide a highly sensitive electronic device and a method for manufacturing the highly sensitive electronic device for preventing premature failure of the device due to moisture or premature degradation of device performance.
    [1] FIG. 1A illustrates a highly sensitive electronic device device in an unencapsulated state containing a plurality of highly sensitive electronic devices on a substrate.
    [2] FIG. 1B illustrates a cross-sectional view of the highly sensitive electronic device element taken along cut line 1B-1B in FIG. 1A.
    [3] 2A illustrates a typical multiple LCD device before separation into a single LCD device.
    [4] 3A shows a typical multiple OLED device encapsulated separately.
    [5] 3B shows a cross-sectional view of the multiple OLED device taken along cut line 3B-3B in FIG. 3A.
    [6] 4A illustrates a highly sensitive electronic device comprising a single encapsulation enclosure and an overpressure damaged sealing material.
    [7] FIG. 4B shows a cross-sectional view of the highly sensitive electronic device element taken along cut line 4B-4B in FIG. 4A.
    [8] FIG. 5A illustrates a highly sensitive electronic device comprising a substrate containing a plurality of highly sensitive electronic devices, a single encapsulation enclosure, a water absorbent material, and a sealing material having a gap.
    [9] FIG. 5B illustrates a cross-sectional view of the highly sensitive electronic device element taken along cut line 5B-5B in FIG. 5A.
    [10] FIG. 6A illustrates a highly sensitive electronic device including a substrate containing a plurality of highly sensitive electronic devices, a single encapsulation enclosure, a temporary moisture barrier, and a sealing material having a gap.
    [11] FIG. 6B illustrates a cross-sectional view of the highly sensitive electronic device element taken along cut line 6B-6B in FIG. 6A.
    [12] FIG. 7A illustrates a highly sensitive electronic device including a substrate containing a plurality of highly sensitive electronic devices, and a sealing material aligned very closely but spaced from the encapsulation inclusion containing the water absorbent material and having a gap therein. .
    [13] FIG. 7B illustrates a cross-sectional view of the highly sensitive electronic device element taken along cut lines 7B, C-7B, and C in FIG. 7A.
    [14] FIG. 7C illustrates the highly sensitive electronic device taken along cut lines 7B, C-7B, C in FIG. 7A after relatively moving the substrate and encapsulation into a point where the sealing material contacts both the substrate and the encapsulation. The cross section is shown.
    [15] FIG. 7D illustrates a highly sensitive material comprising a substrate containing a plurality of highly sensitive electronic devices, a sealing material having a gap, an encapsulating enclosure, and a water absorbent material after the relative movement of the substrate and the encapsulating enclosure toward a predetermined interval leaves a gap in the sealing material. The electronic device 25 is shown.
    [16] FIG. 7E illustrates a cross-sectional view of the highly sensitive electronic device element taken along cut line 7E-7E in FIG. 7D.
    [17] FIG. 7F illustrates a highly sensitive electronic device including a substrate after separation of the initial substrate, a sealing material having a gap, an encapsulation enclosure, and a water absorbing material.
    [18] FIG. 7G illustrates a cross-sectional view of the highly sensitive electronic device taken along cut line 7G-7G in FIG. 7F.
    [19] FIG. 7H illustrates a highly sensitive electronic device that includes a substrate after sealing the gap, a sealing material having the gap, an encapsulation enclosure, and a water absorbing material.
    [20] FIG. 7I illustrates a cross-sectional view of the highly sensitive electronic device taken along cut line 7I-7I in FIG. 7H.
    [55] As used herein, the term “highly sensitive electronic device” is used to refer to a device containing one or more high sensitive electronic devices during and / or after manufacture of the high sensitive electronic device. The term " highly sensitive electronic device " is used to refer to any electronic device that is susceptible to degradable performance of the device when the ambient moisture level is 1000 ppm or more. The term "substrate" is used herein to refer to an organic solid, an inorganic solid, or a combination of organic and inorganic solids, on which one or more highly sensitive electronic devices are made. The term "encapsulated enclosure" is used to refer to an organic solid, an inorganic solid, or a combination of organic and inorganic solids used to protect one or more highly sensitive electronic devices from moisture, and moisture through the encapsulated enclosure. To prevent or restrict the penetration of The term "sealing material" is used to refer to an organic, inorganic, or combination of organic and inorganic materials used to bond an encapsulated enclosure to a substrate and protect one or more highly sensitive electronic devices from moisture. Prevent or limit moisture penetration through the sealing material. The term "gap" is used to refer to discontinuities in the sealing material around one or more electronic devices. The term "water absorbent material" is used to refer to an inorganic material used for physically or chemically absorbing moisture or reacting with moisture that damages highly sensitive electronic devices. The term "temporary moisture barrier" refers to organics, inorganics, or organics and inorganics used to prevent or limit moisture-induced damage to high-sensitivity electronic devices when exposed to ambient moisture levels of 1000 ppm or more for a short period of time, typically less than 10 days. It is used to refer to the combination of.
    [56] In FIG. 5A, one embodiment of a highly sensitive electronic device element 14 in accordance with the present invention is shown. The highly sensitive electronic device 14 includes a substrate 10 containing a plurality of highly sensitive electronic devices 12, a single encapsulation enclosure 30 encapsulating all of the highly sensitive electronic devices 12 on the substrate 10, A sealing material 20 having a gap therein and defined by a space surrounding each of the highly sensitive electronic devices 12, and a substrate 10 and an encapsulation enclosure 30 in a space defined by the sealing material 20. ) And a water absorbent material 60 disposed between them. FIG. 5B shows a cross-sectional view of the highly sensitive electronic device element 14 taken along cut line 5B-5B in FIG. 5A. In FIGS. 5A and 5B, although the highly sensitive electronic device element 14 is shown to include four highly sensitive electronic devices 12, the highly sensitive electronic device device of the present invention is one or more of any number of highly sensitive materials. It may include an electronic device. By encapsulating all the highly sensitive electronics on the substrate into a single encapsulation enclosure, there is an advantage of reduced handling compared to the prior art of individually encapsulating each of the highly sensitive electronics on the substrate into individual encapsulation enclosures. As shown in FIGS. 5A and 5B, the substrate 10 and encapsulation inclusion 30 may be an organic solid, an inorganic solid, or a combination of organic and inorganic solids. The substrate 10 and encapsulation enclosure 30 may be rigid or flexible, and may be treated as separate discrete pieces, such as sheets or wafers, or as a continuous roll. Typical substrate 10 and encapsulation inclusion 30 materials include glass, plastics, metals, ceramics, semiconductors, metal oxides, metal nitrides, metal sulfides, semiconductor oxides, semiconductor nitrides, semiconductor sulfides, carbon, or combinations thereof. do. The substrate 10 and encapsulation enclosure 30 may be a homogeneous mixture of materials, a composite, or a multilayer of materials. Although the sealing material 20 shown in FIGS. 5A and 5B each surrounds individual high sensitive electronics, the sealing material may be more than two sensitive if a final product comprising one or more highly sensitive electronics is required within a single device. It may surround a group of wet electronics. In addition, the sealing material surrounding each of the high sensitive electronics or groups of high sensitive electronics may provide any clearance such that the pressure in the cavity defined by the substrate, encapsulation encapsulation and sealing material is equal to the pressure around the high sensitive electronics. It contains. The sealing material may be organic, inorganic or a combination of organic and inorganic. The sealing material may be bonded to the substrate and encapsulation enclosure by melting and cooling, or by reaction curing. Typical materials that are bonded by melting and cooling include glass; Hot melt adhesives such as polyolefins, polyesters, polyamides, or combinations thereof; Or inorganic conjugates such as indium, tin, lead, silver, gold or combinations thereof. Typical reaction curing methods include reactions resulting from heating, UV radiation, mixing of two or more components, exposure to ambient moisture, removal of ambient oxygen, or combinations thereof. Typical materials bound by reaction curing include acrylates, epoxies, polyurethanes, silicones, or combinations thereof. Other inorganic materials typically used as sealing materials include glass, ceramics, metals, semiconductors, metal oxides, semiconductor oxides, or combinations thereof. A water absorbent material is used to protect the device from moisture before separating the highly sensitive electronic device into smaller single or multiple devices. The water absorbent material is used to absorb or react with moisture that damages the highly sensitive electronic device. Typical water absorbent materials include alkali metal oxides, alkaline earth metal oxides, sulfates, metal halides, perchlorates, molecular sieves and metals having a work function of less than 4.5 eV and which can be oxidized in the presence of moisture, or combinations thereof. . The water absorbent material may be packaged in a moisture permeable container or binder. The water absorbent material may be a single material, a homogeneous mixture of materials, a complex of materials, or a multilayer of materials.
    [57] In FIG. 6A, another embodiment of a highly sensitive electronic device element 14 in accordance with the present invention is shown. The highly sensitive electronic device 14 includes a substrate 10 containing a plurality of highly sensitive electronic devices 12, a single encapsulation enclosure 30 encapsulating all of the highly sensitive electronic devices 12 on the substrate 10, Sealing material 20 having a gap therein and defining a space surrounding each of the highly sensitive electronics 12, and a temporary moisture proof layer 62 coated over each of the highly sensitive electronics 12. FIG. 6B shows a cross-sectional view of the highly sensitive electronic device element 14 taken along cut line 6B-6B in FIG. 6A. The details of the highly sensitive electronic device 12, the substrate 10, the encapsulation enclosure 30, and the sealing material 20 are the same as the embodiments shown in FIGS. 5A and 5B. The temporary moisture barrier 62 is used to prevent or limit moisture-induced damage in high humidity electronic devices that are exposed to ambient moisture levels of 1000 ppm or more for a short period of time. The temporary moisture barrier may be organic, inorganic, or a combination thereof. Typical organics include epoxy, polyurethane, polyurea, acrylates, silicones, polyamides, polyimides, phenolic, polysulfones, polyolefins, polyesters, or combinations thereof. Typical inorganics include glass, ceramics, metals, semiconductors, metal oxides, metal nitrides, metal sulfides, semiconductor oxides, semiconductor nitrides, semiconductor sulfides, carbon or combinations thereof. The temporary moisture barrier can be a single material, a homogeneous mixture of materials, a composite of materials, or multiple layers of materials.
    [58] 7A-7I illustrate one embodiment according to the present invention of a method of manufacturing a highly sensitive electronic device having a plurality of highly sensitive electronic devices (eg, OLED devices) on a single substrate, from a substrate. Protecting the highly sensitive electronic device from moisture before separating it into individual devices. FIG. 7A illustrates a substrate 10 containing a plurality of highly sensitive electronic devices 12, and a gap therein, in an encapsulation enclosure 30 encapsulating all of the highly sensitive electronic devices 12 on the substrate 10. A highly sensitive electronic device element 14 is shown comprising a sealing material 20 that is in close proximity but spaced apart, and a water absorbent material 60 disposed within each sensitive electronic device after bonding. FIG. 7B shows a cross-sectional view of the highly sensitive electronic device element 14 taken along cut lines 7B, C-7B, C in FIG. 7A. The ambient pressure may be above, below or equal to atmospheric pressure. The details of the highly sensitive electronics 12, the substrate 10, the encapsulation enclosure 30, the sealing material 20, and the water absorbing material 60 are the same as the embodiments shown in FIGS. 5A and 5B. Do. In other embodiments, as described in detail in the embodiment shown in FIGS. 6A and 6B, the temporary moisture barrier layer coated on the highly sensitive electronics 12 replaces the water absorbent material 60 or the water absorbent material and Both temporary moisture barriers can be used. FIG. 7C shows the relative movement 90 of the substrate 10 and the encapsulation 30 toward the point where the sealing material 20 is in contact with both the substrate 10 and the encapsulation 30. A cross-sectional view of the highly sensitive electronic device element 14 taken along cut lines 7B, C-7B, and C in FIG.
    [59] 7D shows that after the excess ambient gas is discharged through the gap, the substrate 10 and the encapsulation 30 are relatively moved to a predetermined space range, and the sealing material 20 is removed from the substrate 10 and The highly sensitive electronic device element 14 is shown after being combined with all of the encapsulation inclusions 30. FIG. 7E illustrates a cross-sectional view of the highly sensitive electronic device element taken along line 7E-7E of FIG. 7D. In this embodiment, the size of the gap selects the size of the gap so that the gap is not filled by dispersion of the sealing material during the step of moving the substrate and encapsulation inclusion to the final predetermined interval range. Since excess gas is discharged through the gap, the pressure difference in the space between the ambient pressure and the substrate 10, the encapsulation inclusion 30, and the sealing material 20 is eliminated and deformation of the sealing material 20 is prevented. . Melting and cooling, reaction curing, or a combination thereof may be used to bond the sealing material 20 to both the substrate 10 and the encapsulation enclosure 30. The reaction curing includes reactions resulting from heating, irradiation, mixing of two or more components, exposure to ambient moisture, removal of ambient oxygen, or a combination thereof. FIG. 7F shows four separate high-sensitivity electronics 12, each having a portion of the initial substrate and an encapsulation enclosure 120 after separating the high-sensitivity electronics of FIG. 7D. FIG. 7G illustrates a cross-sectional view of the highly sensitive electronic device 12 taken along cut line 7G-7G in FIG. 7F. FIG. 7H shows four separate, highly sensitive electronic devices 12, each having a portion of the initial substrate and an encapsulation enclosure 120 after sealing the gap in the sealing material with the gap sealing material 122. FIG. 7L illustrates a cross-sectional view of the highly sensitive electronic device 12 taken along cut line 7I-7I in FIG. 7H. The gap sealing material may be the same material as the sealing material or may be a different sealing material. The sealing material may be organic, inorganic, or a combination thereof.
    [60] Experiment method
    [61] I. Composition of OLED Test Structure
    [62] A plurality of identical OLED test structures were prepared by the following processing sequence:
    [63] (1) A glass substrate having 10 photopermeable anodes of indium tin oxide (ITO) and an in-situ cathode separator of photoresist material on one surface thereof was sonicated with a commercial detergent and washed with deionized water. Rinsed, degreased with toluene vapor, and contacted with strong oxidizing agent;
    [64] (2) 150 nm thick organic hole transport layer of 4,4'-bis- [N- (1-naphthyl) -N-phenylamino] biphenyl (NPB) on the substrate and the anode by conventional vacuum vaporization; To form;
    [65] (3) An organic light emitting layer of tris (8-quinolinato-N1, O8) -aluminum (Alq) (C545T) doped at 0.5% by volume on the NPB hole transport layer was formed by a conventional vacuum vaporization method to a thickness of 375 nm. ;
    [66] (4) forming an organic electron transporting layer of tris (8-quinolinato-N1, O8) -aluminum (Alq) with a thickness of 375 nm on the NPB hole transporting layer by a conventional vacuum vaporization method;
    [67] (5) forming a cathode in the direction perpendicular to the anode on the Alq electron transport layer using vacuum deposition of 0.5 nm LiF and 100 nm aluminum through a shadow mask, thereby defining an intersection region between the anode and the cathode, An area at which an emission can be initiated through electron-hole recombination is defined at or near the interface between the Alq electron transport layer and the NPB hole transport layer.
    [68] II. Preparation and Sealing of Encapsulations for OLED Test Structures
    [69] (1) prior to forming the dry layer, forming multiple cavity containing glass encapsulation by selectively etching the glass substrate by the same cleaning method as the substrate cleaning method of step (1) described above;
    [70] (2) forming and curing an absorbent layer in the cavity of the encapsulation enclosure;
    [71] (3) disposing a sealing material having a gap around each cavity on the encapsulation inclusion;
    [72] (4) placing the encapsulation inclusion containing the substrate and the sealing material containing the OLED test structure obtained in item I above in a dry box at atmospheric pressure containing less than 100 ppm moisture, but arranged so as to be spaced apart from each other;
    [73] (5) provide relative movement between the substrate and the encapsulation, until the sealing material is in contact with both the substrate and the encapsulation, and the substrate and encapsulation are spaced 20-30 μm apart and the gap in the sealing material is maintained. and;
    [74] (6) combining the sealing material with both the substrate and the encapsulation enclosure to form a test structure;
    [75] (7) take out the test structure from the drybox and expose it to the ambient ambient air at a temperature of about 70 ° C. and 40% relative humidity at different times, respectively, and separate into separate OLED devices;
    [76] (8) The OLED device was put back into a dry box and the gap was sealed with a gap sealing material.
    [77] III. Testing of Enclosed OLED Test Structures
    [78] (1) testing nine intentionally identical OLED test structures, each consisting of inclusions containing intentionally identical absorbing layers, to provide data relating to variations in performance and performance of the set of enclosed test structures;
    [79] (2) Measure the physical and electrical width W of the cathode as follows:
    [80] (i) physical and electrical widths were measured using an optical microscope calibrated by measuring the distance between the cathode separators;
    [81] (ii) Applying a voltage from the driving voltage source between the cathode and the anode to measure the electrical width during the operation of the structural test specimen, and adjust the current density in the region defined by the intersection of the anode and the cathode to be 20 mA / cm 2. It was. The width of luminescence in the direction across the cathode provided a measure of the electrical cathode width measured with a calibrated microscope.
    [82] (3) Depending on the efficacy of the absorbing layer formed in the enclosure of the OLED test structure, the final electrical width of the cathode was somewhat less than the initial electrical cathode width. After encapsulation, the deviation between the initial electrical cathode width and the final electrical cathode width in each set of test structures was flattened, which is the efficiency of the absorber layer to protect the OLEDs exposed to short-term exposure to the ambient air during the fabrication of the encapsulated OLED device. It was evaluated as a numerical value of.
    [83] IV. result
    [84] Encapsulation at all locations within the test structure was evaluated based on the quality of the scaling material after bonding and the difference between the initial electrical cathode width and the final electrical cathode width after encapsulation. When damage to the sealing material was apparently caused by the pressure difference between the inside and outside of the scaling material, the sealing performance was evaluated as poor. When no damage occurred at all, the sealing performance was evaluated as good. When minor damage occurred, the said sealing performance was evaluated as moderate. Before separating the OLED device elements, all test structures with gaps in the sealing material were evaluated as good. The table below shows the variation between the initial electrical cathode width and the final electrical cathode width of the OLED device protected by the water absorbent material during manufacturing, with different exposure times to ambient ambient air, and the water absorbent material during manufacturing. The relationship between the deviations of OLED devices not protected by them is shown. As shown in the table below, the water absorbent material protects the OLED device from damage caused by exposure to moisture for a short period of 1-2 hours during manufacture. OLEDs that do not use water absorbing materials are damaged even under exposures of less than one hour.
    [85] Exposure time around the labDifference between initial electrical cathode width and final electrical cathode width when water absorbent material is usedIf no water absorbent material is used, the difference between the initial electrical cathode width and the final electrical cathode width 0 hours00 1 hours017 2 hours434 3 hours2044
    [86] The present invention provides an encapsulation encapsulation that encapsulates all highly sensitive electronics on a substrate, and an encapsulation encapsulation and substrate positioned around each of the highly sensitive electronics or groups of highly sensitive electronics located between the substrate and the encapsulation inclusion. By providing a highly sensitive element comprising a sealing material forming a partial seal therebetween and a method of manufacturing the element, an effect of preventing premature failure of the device due to moisture and premature deterioration of device performance is obtained.
    权利要求:
    Claims (10)
    [1" claim-type="Currently amended] a) a substrate containing at least two highly sensitive electronic devices;
    b) an encapsulation enclosure that encapsulates all highly sensitive electronics on the substrate;
    c) a sealing material positioned between the substrate and the encapsulation enclosure to form a partial seal between the substrate and the encapsulation enclosure and a space around each sensitive electronic device or group of sensitive electronic devices; And
    d) a water absorbent material located between the substrate and the encapsulation enclosure and present in a space defined by the sealing material;
    A highly sensitive electronic device element having a highly sensitive electronic device.
    [2" claim-type="Currently amended] The method of claim 1,
    Highly sensitive electronic devices in which the substrate comprises rigid or flexible glass, plastics, metals, ceramics, semiconductors, metal oxides, metal nitrides, metal sulfides, semiconductor oxides, semiconductor nitrides, semiconductor sulfides, carbon, or combinations thereof device.
    [3" claim-type="Currently amended] The method of claim 1,
    Highly sensitive electronic devices wherein the encapsulation includes rigid or flexible glass, plastics, metals, ceramics, semiconductors, metal oxides, metal nitrides, metal sulfides, semiconductor oxides, semiconductor nitrides, semiconductor sulfides, carbon, or combinations thereof .
    [4" claim-type="Currently amended] The method of claim 1,
    A highly sensitive electronic device in which the sealing material is an organic, inorganic or combination thereof that has been melted and cooled or reactively cured.
    [5" claim-type="Currently amended] The method of claim 4, wherein
    A highly sensitive electronic device wherein the reaction curing comprises a reaction resulting from heating, irradiation, mixing of two or more components, exposure to ambient moisture, removal of ambient oxygen, or a combination thereof.
    [6" claim-type="Currently amended] The method of claim 4, wherein
    Highly sensitive electronic device wherein the organic material is selected from the group consisting of epoxy, polyurethane, acrylate, silicone, polyamide, polyolefin and polyester and combinations thereof.
    [7" claim-type="Currently amended] The method of claim 4, wherein
    A highly sensitive electronic device wherein the inorganic material is selected from the group consisting of glass, ceramics, metals, semiconductors, metal oxides, semiconductor oxides and metal junctions and combinations thereof.
    [8" claim-type="Currently amended] The method of claim 1,
    The water absorbent material is selected from the group consisting of alkali metal oxides, alkaline earth metal oxides, sulfates, metal halides, perchlorates, molecular sieves, and metals having a work function of less than 4.5 eV and oxidized in the presence of moisture and combinations thereof. Highly sensitive electronic device.
    [9" claim-type="Currently amended] a) a substrate containing at least two sensitive electronic devices coated with a temporary moisture barrier;
    b) an encapsulation enclosure that encapsulates all highly sensitive electronics on the substrate; And
    c) a sealing material positioned between the substrate and the encapsulation enclosure to form a partial seal between the encapsulation enclosure and the substrate around each of the sensitive electronic devices or around the group of sensitive electronic devices;
    A highly sensitive electronic device element having a highly sensitive electronic device.
    [10" claim-type="Currently amended] The method of claim 9,
    A highly sensitive electronic device wherein the substrate comprises rigid or flexible glass, plastic, metal, ceramic, semiconductor, metal oxide, metal nitride, metal sulfide, semiconductor oxide, semiconductor nitride, semiconductor sulfide, carbon, or combinations thereof.
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    同族专利:
    公开号 | 公开日
    CN1246898C|2006-03-22|
    US6590157B2|2003-07-08|
    TW560025B|2003-11-01|
    US20030062186A1|2003-04-03|
    EP1296388A2|2003-03-26|
    EP1296388A3|2006-10-04|
    CN1409390A|2003-04-09|
    JP2003179197A|2003-06-27|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2001-09-21|Priority to US09/957,856
    2001-09-21|Priority to US09/957,856
    2002-09-19|Application filed by 이스트맨 코닥 캄파니
    2003-03-29|Publication of KR20030025868A
    优先权:
    申请号 | 申请日 | 专利标题
    US09/957,856|US6590157B2|2001-09-21|2001-09-21|Sealing structure for highly moisture-sensitive electronic device element and method for fabrication|
    US09/957,856|2001-09-21|
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